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Grazing Incidence Impact Of Ions On An Adatom-Covered Surface: Molecular-Dynamics Study Of Sputtering, Surface-Damage Formation And Ion-Induced Adatom Mobility

Grazing Incidence Impact Of Ions On An Adatom-Covered Surface: Molecular-Dynamics Study Of Sputtering, Surface-Damage Formation And Ion-Induced Adatom Mobility
Yudi Rosandi, Herbert M. Urbassek
Universitas Padjadjaran, Surface Science 600 (2006) 1260–1264, doi:10.1016/j.susc.2005.12.063, Elsevier B.V.
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Universitas Padjadjaran, Surface Science 600 (2006) 1260–1264, doi:10.1016/j.susc.2005.12.063, Elsevier B.V.
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Using molecular-dynamics simulation, we study the exemplary case of 5 keV Ar impact onto a Pt(1 11) surface at 83o incidence angle towards the surface normal. Under these conditions, on a flat terrace, the ions are specularly reflected, inducing neither damage nor sput ing of the surface. This situation changes drastically, if the surface is covered randomly with a coverage θ of adatoms. For 0.1 < θ < 0.5, average sputter yields and damage of up to a value of 5 and 9, respectively, are achieved. For coverages around θ = 0.3–0.4, 50 adatoms are relocated on the average on the surface, affecting an area of around 1000 Å2. This ion-induced mobility promotes adatom clustering, which typically leads to a rim-like structure around the ion impact point.

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