Pustaka Ilmiah Universitas Padjadjaran

Abstrak

Effect of Surface Defects on Sputtering by Grazing Ion Bombardment (Dissertation)

The effects of surface defects on a sputtering experiment at grazing ion incidence are observed using molecular dynamics simulations. In this sequence of simulations a Pt(111) is chosen as the target crystallite surface and a 5 keV Ar+ ion is used as the ion projectile. The angle of incidence of the ion is 83° with respect to the surface normal, except for some simulation where the influence of the incidence angle is observed. On a clean flat terrace the damage creation starts at the angle of incidence v of around 81°. For v larger than this value, no damage is produced. By changing gradually the angle of incidence and observing the sputter yield as a function of angle, the characteristic of surface channeling is determinable. The characteristic channeling angle at around 73°, with respect to the surface normal, is determined. At larger angles the sputter yield is very small. At smaller angles the yield is extremely increased towards the value of normal incidence.