Pustaka Ilmiah Universitas Padjadjaran

Abstrak

Sputtering At Grazing Ion Incidence: Influence Of Adatom Islands

When energetic ions impinge at grazing incidence onto an atomically flat terrace, they will not sputter.However, when adatom islands (containing N atoms) are deposited on the surface, they induce sputtering. We investigate this effect for the specific case of 83°-incident 5 keV Ar ions on a Pt (111) surface by means of molecular-dynamics simulation and experiment. We find that for constant coverage θ—the sputter yield has a maximum at island sizes of N = 10–20. A detailed picture explaining the decline of the sputter yield toward larger and smaller island sizes is worked out. Our simulation results are compared with dedicated sputtering experiments, in which a coverage of θ =0.09 of Pt adatoms are deposited onto the Pt (111) surface and form islands with a broad distribution around a most probable size of N = 20.