Abstrak 
The Technique of Lloyd-Mirror Interference for Fabrication of 1D and 2D Grating in Hybrid Polymer Material
Sahrul Hidayat, Fitrilawati
Universitas Padjadjaran, Padjadjaran International Physics Symposium 2013 (PIPS-2013) Contribution of Physics on Environmental and Energy Conservations Universitas Padjadjaran, West Java, Indonesia 7-9 May 2013, ISBN 978-0-7354-1180-7, ISSN 0094-243X
Bahasa Inggris
Universitas Padjadjaran, Padjadjaran International Physics Symposium 2013 (PIPS-2013) Contribution of Physics on Environmental and Energy Conservations Universitas Padjadjaran, West Java, Indonesia 7-9 May 2013, ISBN 978-0-7354-1180-7, ISSN 0094-243X
grating, hybrid polymer, Lloyd Mirror interference
The grating is a periodic structure which commonly used in optical technology, such as frequency splitter, optical filter, spectrophotometer and laser resonator. In this paper, we reported the results of grating fabrication of hybrid polymer by use of Lloyd Mirror interference method. The grating with the shape of 1D, 2D square and 2D hexagonal was successfully fabricated. Various of the grating period is relatively easy to be fabricated by controlling the incident angle of laser. The surface profile of the grating was observed using Atomic Force Microscopy (AFM). The AFM measurements show the grating period vary in the range of 350 nm to1000 nm for 1D grating and 390-410 nm for 2D grating. The analysis of the AFM image showed the depths of gratings were vary from 20 nm to 100 nm.