Abstrak 
Competition Of Terrace And Step-edge Sputtering Under Oblique-incidence Ion Impact On A Stepped Pt(111) Surface
Competition Of Terrace And Step-edge Sputtering Under Oblique-incidence Ion Impact On A Stepped Pt(111) Surface
Yudi Rosandi, Alex Redinger, Thomas Michely, Herbert M. Urbassek
Universitas Padjadjaran, Nuclear Instruments and Methods in Physics Research B 267 (2009) 2769–2773, doi:10.1016/j.nimb.2009.05.051, Elsevier B.V. journal homepage: www.elsevier.com/locate/nimb
Bahasa Inggris
Universitas Padjadjaran, Nuclear Instruments and Methods in Physics Research B 267 (2009) 2769–2773, doi:10.1016/j.nimb.2009.05.051, Elsevier B.V. journal homepage: www.elsevier.com/locate/nimb
Ion reflection, molecular dynamics simulation, Sputtering
Yudi Rosandi, Alex Redinger, Thomas Michely, Herbert M. Urbassek
Universitas Padjadjaran, Nuclear Instruments and Methods in Physics Research B 267 (2009) 2769–2773, doi:10.1016/j.nimb.2009.05.051, Elsevier B.V. journal homepage: www.elsevier.com/locate/nimb
Bahasa Inggris
Universitas Padjadjaran, Nuclear Instruments and Methods in Physics Research B 267 (2009) 2769–2773, doi:10.1016/j.nimb.2009.05.051, Elsevier B.V. journal homepage: www.elsevier.com/locate/nimb
Ion reflection, molecular dynamics simulation, Sputtering
Using molecular-dynamics simulation, we study the sputtering of a Pt(1 11) surface under oblique and glancing incidence 5 keV Ar ions. For incidence angles larger than a critical angle Vc, the projectile is reflected off the surface and the sputter yield is zero. We discuss the azimuth dependence of the critical angle Vc with the help of the surface corrugation felt by the impinging ion. If a step exists on the surface, sputtering occurs also for glancing incidence V > Vc. We demonstrate that for realistic step densities, the total sputtering of a stepped surface may be sizable even at glancing incidence.
Download: .Full Papers